颁布单位:[University of Alberta] |
颁布时间:2013 |
实施时间:2013 |
学科分类:[Anchor, Modeling, SML, Resist, HSQ, Resist, Process, Windows, Polymer, Physics, PMMA, Resist, Electron, Beam, Lithography, Nanofabrication, Molecular, Dynamics, Simulations, Nanomechanical, Cantilevers, ZEP, Resist, Silicon, Carbon, Nitride, (SiCN), Polymer, Solutions, Resonant, Nanostrings, Sub-10, nm, Nanofabrication, Dense, Gratings, Flory-Huggins, Theory, Diffusivity]