颁布单位：[University of Alberta] |  颁布时间：2013 |  实施时间：2013 |  学科分类：[Anchor, Modeling, SML, Resist, HSQ, Resist, Process, Windows, Polymer, Physics, PMMA, Resist, Electron, Beam, Lithography, Nanofabrication, Molecular, Dynamics, Simulations, Nanomechanical, Cantilevers, ZEP, Resist, Silicon, Carbon, Nitride, (SiCN), Polymer, Solutions, Resonant, Nanostrings, Sub-10, nm, Nanofabrication, Dense, Gratings, Flory-Huggins, Theory, Diffusivity]

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