颁布单位：[University of Michigan] |  颁布时间：2009 |  实施时间：2009 |  学科分类：[Spectroscopy, MEMS, Tunable Grating, Polymer, PDMS, Fluorescence, Mechanical Engineering, Engineering, Mechanical Engineering]

预览  |  原文链接    [浏览：69 下载：40]

颁布单位：[University of Michigan] |  颁布时间：2009 |  实施时间：2009 |  学科分类：[MEMS, Wafer-level Packaging, Vacuum Pacakaging, Generic Assembly, Gyroscope, Environment-resistant, Electrical Engineering, Engineering, Electrical Engineering]

预览  |  原文链接    [浏览：34 下载：17]

颁布单位：[University of Michigan] |  颁布时间：2009 |  实施时间：2009 |  学科分类：[Heat Exchanger, Joule-Thomson Cooler, MEMS, Cryosurgery, In-Situ Temperature Sensing, Flow Modulation, Electrical Engineering, Mechanical Engineering, Engineering, Mechanical Engineering]

预览  |  原文链接    [浏览：44 下载：0]

颁布单位：[University of Michigan] |  颁布时间：2009 |  实施时间：2009 |  学科分类：[Microvalve, MEMS, Piezoelectric Actuation, Cryogenic Cooling, Sensors, Electrical Engineering, Engineering, Electrical Engineering]

预览  |  原文链接    [浏览：26 下载：17]