颁布单位：[University of Alberta] |  颁布时间：2015 |  实施时间：2015 |  学科分类：[Spectroscopic, Ellipsometry, Atomic, Layer, Deposition, ALD, Process, Optimization, Conducting, Zirconium, Nitride, Growth]

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颁布单位：[University of Alberta] |  颁布时间：2014 |  实施时间：2014 |  学科分类：[TR-UTLC, Columnar, thin, film, Nanomaterials, Atomic, layer, deposition, GLAD, Chromatography, RIE, TLC, Macroporous, thin, film, Planar, chromatography, Chromatogram, Thin-layer, chromatography, Reactive, ion, etch, Nanocomposites, Concentration, zone, Ultrathin-layer, chromatography, Nanostructured, thin, film, Sorbent, Time-resolved, ultrathin-layer, chromatography, Stationary, phase, Glancing, angle, deposition, UTLC, ALD, Densitogram]

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