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颁布单位：[University of Michigan] |
颁布时间：2011 |
实施时间：2011 |
学科分类：[Implantable, Biomedical, MEMS, Microsystems, Glass-in-Silicon, Electrical Engineering, Engineering, Electrical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2010 |
实施时间：2010 |
学科分类：[Microphone, MEMS, Piezoelectric, Electrical Engineering, Mechanical Engineering, Engineering, Mechanical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2010 |
实施时间：2010 |
学科分类：[MEMS, Microfluidics, PCR, Gas Chromatography, Thermal Modulator, Mechanical Engineering, Engineering, Mechanical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2010 |
实施时间：2010 |
学科分类：[Oxygen, Micro Gradient, Microfluidics, Metabolic, Mass Transfer, MEMS, Electrical Engineering, Engineering, Electrical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2010 |
实施时间：2010 |
学科分类：[MEMS, Drug Delivery, Valve, Chronic Pain, Piezoelectric, Volume Efficiency, Electrical Engineering, Engineering, Electrical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2009 |
实施时间：2009 |
学科分类：[Heat Exchanger, Joule-Thomson Cooler, MEMS, Cryosurgery, In-Situ Temperature Sensing, Flow Modulation, Electrical Engineering, Mechanical Engineering, Engineering, Mechanical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2009 |
实施时间：2009 |
学科分类：[Microvalve, MEMS, Piezoelectric Actuation, Cryogenic Cooling, Sensors, Electrical Engineering, Engineering, Electrical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2009 |
实施时间：2009 |
学科分类：[MEMS, Wafer-level Packaging, Vacuum Pacakaging, Generic Assembly, Gyroscope, Environment-resistant, Electrical Engineering, Engineering, Electrical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2009 |
实施时间：2009 |
学科分类：[Spectroscopy, MEMS, Tunable Grating, Polymer, PDMS, Fluorescence, Mechanical Engineering, Engineering, Mechanical Engineering]
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颁布单位：[University of Michigan] |
颁布时间：2008 |
实施时间：2008 |
学科分类：[Oscillator, Resonator, Nickel, MEMS, Integration, Electrical Engineering, Engineering, Electrical Engineering]
效力级别
2019
