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MEMS

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Sea of Electrodes Array (SEA): Customizable 3D High-Density High-Count Neural Probe Array Technology

颁布单位：[University of Michigan] | 颁布时间：2019 | 实施时间：2019 | 学科分类：[Electrode Array, Neural Interface, MEMS, Brain-Machine Interfaces, Neural Probe, Neural Recording and Stimulation, Electrical Engineering, Engineering, Electrical Engineering]

预览 | 原文链接 [浏览：36 下载：20]
Multifunctional Micro-Scale Sensors for Water Safety Monitoring with Only Bare Platinum Electrodes

颁布单位：[University of Michigan] | 颁布时间：2017 | 实施时间：2017 | 学科分类：[water monitoring, MEMS, sensor, Chemical Engineering, Engineering, Chemical Engineering]

预览 | 原文链接 [浏览：15 下载：3]
MEMS-Based Endomicroscopes for High Resolution in vivo Imaging

颁布单位：[University of Michigan] | 颁布时间：2017 | 实施时间：2017 | 学科分类：[endomicroscope, endoscopy, MEMS, in vivo, colorectal cancer, Biomedical Engineering, Engineering, Biomedical Engineering]

预览 | 原文链接 [浏览：30 下载：16]
Piezoelectric Fused Silica Resonators for Timing References.

颁布单位：[University of Michigan] | 颁布时间：2016 | 实施时间：2016 | 学科分类：[MEMS, Resonator, Fused Silica, Piezoelectric Actuation, Timing References, Charge Redistribution, Electrical Engineering, Engineering, Electrical Engineering]

预览 | 原文链接 [浏览：18 下载：14]
Packaging Technologies for Millimeter Scale Microsystems in Harsh Environment Applications

颁布单位：[University of Michigan] | 颁布时间：2016 | 实施时间：2016 | 学科分类：[Packaging, Microsystems, MEMS, Harsh environment, Electrical Engineering, Mechanical Engineering, Engineering, Mechanical Engineering]

预览 | 原文链接 [浏览：23 下载：15]
Designing Thermal Modulators for Portable GC x GC Systems.

颁布单位：[University of Michigan] | 颁布时间：2015 | 实施时间：2015 | 学科分类：[microscale thermal modulator, two dimensional gas chromatography, Thermal modulation model, MEMS, Electrical Engineering, Engineering (General), Mechanical Engineering, Chemistry, Physics, Science (General), Engineering, Health Sciences, Science, Mechanical Engineering]

预览 | 原文链接 [浏览：15 下载：1]
Si-Micromachined Knudsen Pumps for High Compression Ratio and High Flow Rate.

颁布单位：[University of Michigan] | 颁布时间：2013 | 实施时间：2013 | 学科分类：[SI-MICROMACHINED KNUDSEN PUMPS FOR HIGH COMPRESSION RATIO AND HIGH FLOW RATE, MEMS, MICROPUMP, Electrical Engineering, Engineering, Electrical Engineering]

预览 | 原文链接 [浏览：35 下载：14]
Energy Efficient Iterative Adaptive On-Off Control of Capacitively-Loaded Actuators for Micro-Robots.

颁布单位：[University of Michigan] | 颁布时间：2012 | 实施时间：2012 | 学科分类：[Iterative Control, On-Off Control, Micro-robot, Adaptive Control, MEMS, Mechanical Engineering, Engineering, Mechanical Engineering]

预览 | 原文链接 [浏览：23 下载：11]
Integration of Bulk Piezoelectric Materials into Microsystems.

颁布单位：[University of Michigan] | 颁布时间：2012 | 实施时间：2012 | 学科分类：[MEMS, Piezoelectric, PZT, Bonding, Energy Harvesting, Actuator, Electrical Engineering, Engineering, Electrical Engineering]

预览 | 原文链接 [浏览：35 下载：5]
High-Performance Micromachined Vibratory Rate- and Rate-Integrating Gyroscopes.

颁布单位：[University of Michigan] | 颁布时间：2012 | 实施时间：2012 | 学科分类：[Gyroscope, MEMS, Electrical Engineering, Engineering, Electrical Engineering]

预览 | 原文链接 [浏览：33 下载：22]