Method of Fabricating X-Ray Absorbers for Low-Energy X-Ray Spectroscopy

[摘要] A method of forming low-energy x-ray absorbers. Sensors may be formed on a semiconductor, e.g., silicon, wafer. A seed metal layer, e.g., gold, is deposited on the wafer and patterned into stem pads for electroplating. Stems, e.g., gold, are electroplated from the stem seed pads through a stem mask. An absorber layer, e.g., gold, is deposited on the wafer, preferably e-beam evaporated. After patterning the absorbers, absorber and stem mask material is removed, e.g., in a solvent bath and critical point drying.

[发布日期] 2018-09-11

[学科分类] 原子、分子光学和等离子物理

[关键词] X RAY ABSORPTION;ABSORBERS (MATERIALS);PATENTS;FABRICATION