Control of a MEMS fast steering mirror for laser applications

[摘要] A control system for a MEMS fast steering mirror is designed and implemented to accurately steer a laser beam. This document contains a characterization of important mirror characteristics and the full analysis of an analog control system designed to maximize the performance of the mirror. A full analysis of the performance of the design, including bandwidth, stability, accuracy, power consumption, and system size and weight, is provided along with optical scan expansion designs. Finally, future possible improvements to the design are discussed.

[发布机构] Massachusetts Institute of Technology