Characterization and analysis of process variability in deeply-scaled MOSFETs

[摘要] Variability characterization and analysis in advanced technologies are needed to ensure robust performance as well as improved process capability. This thesis presents a framework for device variability characterization and analysis. Test structure and test circuit design, identification of significant effects in design of experiments, and decomposition approaches to quantify variation and its sources are explored. Two examples of transistor variability characterization are discussed: contact plug resistance variation within the context of a transistor, and AC, or short time-scale, variation in transistors. Results show that, with careful test structure and circuit design and ample measurement data, interesting trends can be observed. Among these trends are (1) a distinct within-die spatial signature of contact plug resistance and (2) a picosecond-accuracy delay measurement on transistors which reveals the presence of excessive external parasitic gate resistance. Measurement results obtained from these test vehicles can aid in both the understanding of variations in the fabrication process and in efforts to model variations in transistor behavior.

[发布机构] Massachusetts Institute of Technology