MEMS characterization LDRD:Final report (FY03-FY05).
[摘要] No abstract prepared.
[发布日期] 2005-12-01 [发布机构] Sandia National Laboratories
[效力级别] [学科分类]
[关键词] Miniaturization;Mass Spectrometry.;Microelectronic Circuits;42 Engineering;Microelectromechanical Systems. [时效性]
