Low-loss LIGA-micromachined conductor-backed coplanar waveguide.

[摘要] A mesoscale low-loss LIGA-micromachined conductor-backed coplanar waveguide is presented. The 517 {micro}m lines are the tallest uniplanar LIGA-fabricated microwave transmission lines to date, as well as the first to be constructed of copper rather than nickel. The conductor-backed micromachined CPW on quartz achieves a measured attenuation of 0.064 dB/cm at 15.5 GHz.

[发布日期] 2004-12-01 [发布机构] Sandia National Laboratories

[关键词] Copper;Quartz;Attenuation;Nickel;Radio Frequency Integrated Circuits.