Meso-scale controlled motion for a microfluidic drop ejector.

[摘要] The objective of this LDRD was to develop a uniquely capable, novel droplet solution based manufacturing system built around a new MEMS drop ejector. The development all the working subsystems required was completed, leaving the integration of these subsystems into a working prototype still left to accomplish. This LDRD report will focus on the three main subsystems: (1) MEMS drop ejector--the MEMS ''sideshooter'' effectively ejected 0.25 pl drops at 10 m/s, (2) packaging--a compact ejector package based on a modified EMDIP (Electro-Microfluidic Dual In-line Package--SAND2002-1941) was fabricated, and (3) a vision/stage system allowing precise ejector package positioning in 3 dimensions above a target was developed.

[发布日期] 2004-12-01 [发布机构] Sandia National Laboratories

[关键词] Flowmeters;Miniaturization;Droplets;Microelectromechanical Systems.;Mesoscale-Materials