Design of a three-axis micro-scale metrology system for the characterization of cylindrical flexures

[摘要] The objective of this thesis was to develop a laser metrology system in order to measure the movement in two of the rotation axes of a cylindrical flexure. The building and characterization of this system was achieved in an effort to measure cylindrical flexures such that rules for modeling them might be developed. The system developed measures translations of the flexure normal to the circular surface of the cylinder as well as rotations about the axes within this plane. While numerous metrology systems capable of achieving these functionalities exist, this system has inherent benefits in cost, range, and resolution. Using three lasers reflected off of mirrors mounted on a cylindrical flexure and captured by photodiodes, we are able to characterize micro-scale movements of the system with a resolution of 134 pm and a range of 5.04[mu]m of translation.

[发布机构] Massachusetts Institute of Technology