Self-Assembled Templates for Fabricating Novel Nano-Arrays and Controlling Materials Growth
[摘要] No abstract prepared.
[发布日期] 2002-02-01 [发布机构] Sandia National Laboratories
[效力级别] [学科分类]
[关键词] Miniaturization;Process Control;Microelectronic Circuits;Materials;42 Engineering [时效性]