Integrated Micro-Machined Hydrogen Gas Sensor. Final Report

[摘要] This report details our recent progress in developing novel MEMS (Micro-Electro-Mechanical Systems) based hydrogen gas sensors. These sensors couple novel thin films as the active layer on a device structure known as a Micro-HotPlate. This coupling has resulted in a gas sensor that has several unique advantages in terms of speed, sensitivity, stability and amenability to large scale manufacture. This Phase-I research effort was focused on achieving the following three objectives: (1) Investigation of sensor fabrication parameters and their effects on sensor performance. (2) Hydrogen response testing of these sensors in wet/dry and oxygen-containing/oxygen-deficient atmospheres. (3) Investigation of the long-term stability of these thin film materials and identification of limiting factors. We have made substantial progress toward achieving each of these objectives, and highlights of our phase I results include the demonstration of signal responses with and without oxygen present, as well as in air with a high level of humidity. We have measured response times of <0.5 s to 1% H{sub 2} in air, and shown the ability to detect concentrations of <200 ppm. These results are extremely encouraging and suggest that this technology has substantial potential for meeting the needs of a hydrogen based economy. These achievements demonstrate the feasibility of using micro-hotplates structures in conjunction with palladium+coated metal-hydride films for sensing hydrogen in many of the environments required by a hydrogen based energy economy. Based on these findings, they propose to continue and expand the development of this technology in Phase II.

[发布日期] 2000-10-02 [发布机构] Advanced Technology Materials, Inc., Danbury, CT (United States)

[关键词] Testing;Oxygen;08 Hydrogen;Sensitivity;Humidity