Rugged Packaging for Damage Resistant Inertial Fusion Energy Optics

[摘要] The development of practical fusion energy plants based on inertial confinement with ultraviolet laser beams requires durable, stable final optics that will withstand the harsh fusion environment. Aluminum-coated reflective surfaces are fragile, and require hard overcoatings resistant to contamination, with low optical losses at 248.4 nanometers for use with high-power KrF excimer lasers. This program addresses the definition of requirements for IFE optics protective coatings, the conceptual design of the required deposition equipment according to accepted contamination control principles, and the deposition and evaluation of diamondlike carbon (DLC) test coatings. DLC coatings deposited by Plasma Immersion Ion Processing were adherent and abrasion-resistant, but their UV optical losses must be further reduced to allow their use as protective coatings for IFE final optics. Deposition equipment for coating high-performance IFE final optics must be designed, constructed, and operated with contamination control as a high priority.

[发布日期] 2003-11-17 [发布机构] PVD Products, Inc.

[关键词] Inertial Fusion Energy;70 Plasma Physics And Fusion Technology Fusion;Durability;36 Materials Science;Optical Coatings