Identification of contact regions in semiconductor transistors by level-set methods

[摘要] In this paper we present the formulation of level-set methods for the inverse problem of identifying an interface in the coefficient of an elliptic equation from a boundary measurement. This problem arises from the modeling of the identification of contact regions by boundary measurements for semiconductor transistors. We propose the Gauss-Newton direction as the interface velocity, and implement the scheme for a parameterized class of interfaces. (C) 2003 Elsevier B.V. All rights reserved.

[发布日期] 2003-10-15

[关键词] inverse problem;level-set methods;semiconductor