A new model for electrostatic MEMS with two free boundaries

[摘要] A moving boundary problem with two free boundaries modeling a two-dimensional idealized MEMS device with pull-in instability is discussed. We use a fixed point argument to show that the model possesses stationary solutions for small source voltages. We also give a rigorous evidence that solutions of the model converge towards solutions of the associated small aspect ratio equation in the vanishing aspect ratio limit (C) 2013 Elsevier Inc. All rights reserved.

[发布日期] 2013-12-15

[关键词] MEMS;Free boundary problem;Small aspect ratio limit