In situ magneto-optical ellipsometry data analysis for films growth control

[摘要] In this work we present the way of ferromagnetic films study by means of magneto-ellipsometry. The method of interpretation of in situ magneto-optical ellipsometry spectra for real time growth control is described. The method has been successfully tested on Si/SiO2/Fe films within the model of a homogeneous semi-infinite medium. As a result, the dielectric tensor components for Fe layer were calculated using a developed approach.

[发布日期] 2017-10-15

[效力级别]  Proceedings Paper

[关键词] Magneto-optical Kerr effect;Ellipsometry;In situ measurements