SURFACE CHEMICAL-STATE OF SPUTTERED CO-CR FILMS

[摘要] Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occurred in the Cr; then the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.

[发布日期] 1991-04-01

[效力级别]  Proceedings Paper