Systematic study of the ion beam mixing of oxide markers into alumina

[摘要] A systematic study of ion beam mixing of thin marker layers into amorphous alumina has been completed. The degree of mixing was found to be controlled by thermodynamic factors, the nature of the marker (oxidation state), and matrix crystallinity. Ballistic mixing was observed for all markers, but the mixing of some oxide markers exhibits a thermally activated regime at higher temperatures. The experiments were conducted from a low temperature of -170 degrees C to a maximum temperature of 750 degrees C. 210 keV Ar was used to ion beam mix the marker layer at the various temperatures. The marker spreading was analyzed using Rutherford backscattering spectroscopy, The mixing of one marker (Fe2O3) into crystalline alumina (sapphire) was compared with that of amorphous alumina. It was found that the marker mixed asymmetrically into the two matrix materials, with a higher degree of mixing into the amorphous matrix. Cross-sectional transmission electron microscopy results verify that there is a preference for the marker to mix into the amorphous alumina layer rather than the crystalline layer.

[发布日期] 1995-12-01

[效力级别]  Proceedings Paper