Measurement of He and H depth profiles in tungsten using ERDA with medium heavy ion beams

[摘要] Elastic recoil detection analysis method (ERDA) with medium heavy analyzing ion beam and its application for the simultaneous measurement of light elements in a very heavy substrate is presented. The availability of cross section data and the method of cross section calculation for recoiled particles are discussed. Different ion species for analyzing beam are discussed with respect to the cross-section data availability, sensitivity of the method, and the depth resolution. Calculations of depth resolution for each element and maximum depth of analysis for tungsten substrate are presented. The influence of the detector geometry and multiple scattering effects on the depth resolution is discussed. An example spectrum measured on tungsten implanted with He seeded D plasma is shown. (C) 2011 Elsevier B.V. All rights reserved.

[发布日期] 2011-12-15

[效力级别]  Proceedings Paper

[关键词] ERDA;Light element analysis;Helium;Oxygen;Cross-section