ION-BEAM MIXING OF MARKER LAYERS INTO AMORPHOUS ALUMINUM-OXIDE

[摘要] Thin layers of various marker species embedded in amorphous Al2O3 were ion beam mixed with 210 keV Ar in a temperature range of -166-degrees-C to 790-degrees-C. All of the metal markers (Ag, Fe, and Zr) were found to mix only to a ballistic level. The oxide markers studied were Fe2O3, Cr2O3, Y2O3, and ZrO2. Thermally assisted ion mixing was seen, in decreasing amounts, in Fe2O3, Y203, and Cr2O3. No thermally assisted ion beam mixing was observed for ZrO2 or the metal markers.

[发布日期] 1994-06-01

[效力级别]  Proceedings Paper