Evidence of Coulomb explosion sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions

[摘要] The phenomenon of Coulomb sputtering of ultra-thin Pt films due to impact of 20 keV highly charged Arq+ (g = 38) ions has been investigated. The results show enhanced erosion of the Pt film with the increase of potential energy of the Ar projectile. (C) 2003 Elsevier B.V. All rights reserved.

[发布日期] 2003-12-01

[效力级别]  Proceedings Paper