THE CHEMICAL-STATE OF IRON IONS IMPLANTED INTO SILICON-CARBIDE

[摘要] Conversion electron Mossbauer spectroscopy (CEMS) was used to determine the local environment of Fe-57 implanted into single crystals of alpha-SiC at room temperature. Rutherford backscattering ion channeling measurements showed the specimens to be amorphous (random) for all fluences studied (1, 3, and 6 x 10(16) ions/cm2, 160 keV). The CEMS spectra were fit with a single component having a distribution of quadrupole split values, i.e., a distribution of electric field gradients. The results indicate a distribution of the implanted iron ions among several sites with slightly differing local environments.

[发布日期] 1991-07-01

[效力级别]  Proceedings Paper