HIGH-RESOLUTION HEAVY-ION-INDUCED X-RAY-SATELLITE EMISSION STUDY OF IMPLANTED SULFUR AS A PROBE OF CO-IMPLANTED OXYGEN IN AN OXIDE SUBSTRATE

[摘要] Using high-resolution measurements, the relative fluorescence yields of the sulfur K-alpha L(n) X-ray satellite lines produced by 24 MeV Si(q+) ion irradiation of a series of quartz glass targets co-implanted to equal doses and depths of sulfur and oxygen have been obtained and compared to the yields from targets implanted to the same depth with sulfur only. The data exhibit lower yields in the higher-order KL(n) satellite lines for the co-implanted oxygen targets but similar dose dependent curves. These results are consistent with oxygen increasing the valence electron density of the local sulfur environment. They also suggest that, with an appropriate choice of a probe ion, HIXSE may be capable of detecting impurity ions in matrices that normally mask the impurity, e.g., oxygen in oxide substrates.

[发布日期] 1991-05-01

[效力级别]  Proceedings Paper