MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

[摘要] Methods for monitoring fluctuations in dose uniformity on spatial scales on the order of 1 cm or less are investigated for the case of a spinning disk ion implanter. Various optical, electrical and physical methods including Therma-Wave signals, optical reflectance, sheet resistance, spreading resistance and Rutherford backscattering are used. Comparison is made to a number of estimates of dose uniformity as a function of beam size and the scanned distance between successive passes through the ion beam.

[发布日期] 1991-04-01

[效力级别]  Proceedings Paper