Fundamental insight on developing low dielectric constant polyimides

[摘要] Thermally stable, durable, insulative polyimides are in great demand for the fabrication of microelectronic devices. In this investigation dielectric and optical properties have been studied for several series of aromatic polyimides. The effect of polarizability, fluorine content, and free volume on dielectric constant was examined. In general, minimizing polarizability, maximizing free volume and fluorination all lowered dielectric constants in the polyimides studied. Published by Elsevier Science S.A.

[发布日期] 1997-10-31

[效力级别]  Proceedings Paper

[关键词] low dielectric constant;polyimides;optical properties;microelectronic devices