SYNTHESIS OF FERROELECTRIC THIN-FILMS VIA METALLOORGANIC DECOMPOSITION

[摘要] Barium titanate (BaTiO3) films have been deposited on platinum and silicon substrates via spin casting metallo-organic compounds and annealing in a conventional oven to 600-degrees-C. This method, called metallo-organic deposition, produces BaTiO3 films with the tetragonal structure and provides for excellent control of film stoichiometry as determined by X-ray and Auger analysis. Variable thicknesses (0.1-5-mu-m) were achieved by spin casting multiple layers of the films. The films on both platinum and silicon were uniform and showed no cracks by scanning electron microscopy. The films show ferroelectric behavior as evidenced by a polarization vs. electric field hysteresis and a peak in the dielectric permittivity around 120-degrees-C.

[发布日期] 1991-07-30