SPUTTERED TITANIA BOROSILICATE GLASS-FILMS

[摘要] Moderately high refractive index titania borosilicate glasses are sputtered into glassy films. Deposition parameters are used to control the stoichiometry and optical properties of the films. Compositions unobtainable by batch melting are achieved with TiO2 levels up to 47 mol.%. The films are extremely durable with average optical intensity damage thresholds of 13.5 GW cm-2. Multilayer films have similar damage thresholds. Total optical losses at 633 nm are 8 dB cm-1 when waveguided in a 0.3-mu-m film on a fused quartz substrate.

[发布日期] 1991-07-30