REACTIVE SPUTTERING OF MOLYBDENUM

[摘要] The composition and crystalline structure of molybdenum oxide thin films is controlled through the process of reactive d.c. magnetron sputtering. A systematic variation in target power density results in a continuous transition in the appearance of molybdenum oxide from a translucent glass to a metallic-like film. New molybdenum oxide crystal structures and compositions are found using X-ray diffraction, selected area diffraction, Auger electron spectroscopy depth profiling and scanning transmission electron microscopy.

[发布日期] 1990-12-01

[效力级别]  Proceedings Paper