T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation

[摘要] AT-shape filtered arc deposition system (T-FAD) is a powerful too[ to prepare high-quality diamond-like carbon (DLC) films. Most macro-particles (droplets) emitted from the graphite cathode are caught at the extension duct of the droplet catcher or collector facing the cathode, and then the clean plasma bent 90 degrees is transported toward the substrate. However, further droplet reduction is still required in order to realize a higher quality film without droplet incorporation. In the present study, T-FAD employed an electrostatic droplet trap (ES-trap). A cylindrical ES-trap was placed in the extension duct part of the T-shape duct of an electromagnetic plasma transportation and droplet filter. The ion current at the exit of the T-filter duct and the current flowing to the ES-trap were measured as a function of the ES-trap bias voltage for various ES-trap positions. The deposition rate and number of droplets were also measured. As a result, it was found that the optimum voltage of the ES-trap was + 35 V and that it was better to place the ES-trap closer to the plasma beam in order to obtain fewer droplets on the film without an excessive decrease in the deposition rate. In the optimum condition, the number of droplets on the DLC film prepared with ES-trap was reduced to 1/3 of that without the ES-trap. (C) 2009 Elsevier B.V. All rights reserved.

[发布日期] 2009-12-31

[效力级别]  Proceedings Paper

[关键词] DLC film;T-shape filtered arc deposition (T-FAD);Droplet reduction;Electrostatic trap (ES-trap)