Ti-Cr-Al-O thin film resistors

[摘要] Thin films of Ti-Cr-Al-O are produced for use as an electrical resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O-2 Vertical resistivity values that range from 10(4) to 10(10) Omega-cm are measured for Ti-Cr-Al-O films. The film resistivity can be design selected through control of the target composition and the deposition parameters. The Ti-Cr-Al-O thin film resistor is found to be thermally stable unlike other metal-oxide films. (C) 2002 Elsevier Science B.V All rights reserved.

[发布日期] 2002-12-02

[效力级别]  Proceedings Paper

[关键词] electrical resistors;Rf sputtering;resistivity