Effect of Al content on the hardness and thermal stability study of AlTiN and AlTiBN coatings deposited by HiPIMS

[摘要] The microstructure, mechanical properties and thermal stability of AT(x)Ti(1-x)N and Al1Ti1-xBN coatings grown by reactive high-power impulse magnetron sputtering (HiPIMS) have been analyzed as a function of Al/(Al + Ti) ratio (x) between 0.5 and 0.8. The coatings were predominantly formed by a face-centered cubic Ti(Al)N crystalline phase, both with and without B, even for x ratios as high as 0.6, which is higher than the ratio typically encountered for AlxTi1-xN coatings deposited by reactive magnetron sputtering. B doping, in combination with the highly energetic deposition conditions offered by HiPIMS, results in the suppression of the columnar grain morphology typically encountered in AlxTi1-xN coatings. On the contrary, the AlxTi1-xN coatings grown by HiPIMS present a dense nanocomposite type microstructure, formed by nanocrystalline Ti(Al) N domains and amorphous regions composed of Ti(Al)B 2 and BN. As a result, high-Al content (x approximate to 0.6) AlxTi1-xN coatings grown by HiPIMS offer higher hardness, elasticity and fracture toughness than AlxTi1-xN coatings. Moreover, the thermal stability and the hot hardness are substantially enhanced, delaying the onset of formation of the detrimental hexagonal AlN phase from 850 degrees C in the case of Al0.6Ti0.4N, to 1000 degrees C in the case of Al0.6Ti0.4N.

[发布日期] 2021-09-25

[效力级别]  Proceedings Paper

[关键词] Coating;Nitride;Nanocomposite;High temperature;Hardness;HiPIMS