Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide

[摘要] Micro-mechanical properties of gold electroplated with dense carbon dioxide contained electrolyte (EP-DCE) were investigated by micro-compression tests using micro-pillar specimens for applications as movable components in MEMS devices. The effect of grain size on the micro-mechanical properties was also investigated using a gold film fabricated by conventional electroplating (CONV-EP). The gold film fabricated by the EP-DCE showed a finer average grain size when compared with that of the CONV-EP. Because of the finer grain size, the micro pillar fabricated from the EP-DCE film showed a higher strength than that of the micro-pillar fabricated from the CONV-EP. An increase in the compressive flow stress from 740 to 810 MPa was observed as dimensions of the micro-pillars decreased from 20 x 20 x 40 to 10 x 10 x 20 mu m(3), which was a result of the sample size effect.

[发布日期] 2018-09-25

[效力级别]  Proceedings Paper

[关键词] Electroplated gold;Dense carbon dioxide;Micro-compression;Size effect