Determination of the sp3 C content of a-C films through EELS analysis in the TEM

[摘要] Electron energy loss spectroscopy (EELS) in a transmission electron microscope (TEM) was employed to estimate the sp(3) C content in magnetron sputtered H-free a-C coatings. The deconvolution procedure developed reduces considerably the error which is due to beam point spread function and sample thickness. The methodology has been applied to thin a-C films deposited through RF magnetron sputtering, and determined that, under the present values of ion current to the substrates (< 1 mA/cm(2)), a variation in energy of the upcoming ions (achieved through a variation in applied substrate bias) has a negligible influence on the C atoms hybridization. (c) 2005 Elsevier B.V. All rights reserved.

[发布日期] 2005-10-01

[效力级别]  Proceedings Paper

[关键词] a-C;H-free;sp(3)/sp(2);EELS;TEM