Tribomechanical and structural properties of a-SiC:H films deposited using liquid precursors on titanium alloy

[摘要] This paper presents a study about deposition parameters with tribological and mechanical properties of a-SiC:H films deposited by PECVD on titanium alloy (Ti-6Al-4V). HMDSO and TMS were used as silicon, carbon, and hydrogen precursors. The deposition temperature and pressure ranged from 400 to 600 degrees C and from 0.5 to 3.0 Torr, respectively. The chemical composition and structural properties of the contained samples were analyzed by XRD, FT-IR, and Raman spectroscopy. The mechanical and tribological properties were evaluated by scratching, nanohardness, friction, and wear tests. The results showed that the films presented amorphous structures, and those obtained with 500 degrees C and 3.0 Torr presented high adhesion and tribological performance. The films grown by using only HMDSO as precursor at 500 degrees C showed the highest deposition rate, higher hardness, good adhesion, and less friction coefficient values. (C) 2015 Elsevier B.V. All rights reserved.

[发布日期] 2015-12-25

[关键词] a-SiC:H films;Liquid precursor;Ti-6Al-4V;Tribology;PECVD;FT-IR