DESIGN OF A MINIATURE ELECTROLYTE CONDUCTIVITY PROBE USING ISFETS IN A 4 POINT CONFIGURATION

[摘要] In this work the design fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 mum allowing a chip area in contact with the electrolyte of 2.2 X 2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.

[发布日期] 1994-04-01

[效力级别]  Proceedings Paper