SiC-based MIS gas sensor for high water vapor environments

[摘要] In this work we will prove that SiC-based MIS capacitors can work in environments with extremely high concentrations of water vapor and still be sensitive to hydrogen, CO and hydrocarbons, making these devices suitable for monitoring the exhaust gases of hydrogen or hydrocarbons based fuel cells. Under the harshest conditions (45% of water vapor by volume ratio to nitrogen), Pt/TaOx/SiO2/SiC MIS capacitors are able to detect the presence of 1 ppm of hydrogen, 2 ppm of CO, 100 ppm of ethane or 20 ppm of ethene, concentrations that are far below the legal permissible exposure limits. (C) 2012 Elsevier B.V. All rights reserved.

[发布日期] 2012-12-01

[效力级别]  Proceedings Paper

[关键词] Gas sensor;Water vapor;Metal-insulator-semiconductor;SiC;Hydrogen;CO;Ethane;Ethene;Fuel cell