Influence of the geometry of illumination and viewing beams on displacement measurement errors in interferometric metrology

[摘要] Out-of-plane interferometers are widely used in metrological investigations. Most of them use divergent beams to allow displacement measurements on a large dimension object and have a configuration which makes them sensitive to in-plane displacements. The limits of such systems are described. The error for different interferometric configurations is computed and solutions to correct it are proposed. It must be noticed that the error could be very large for some common configurations and has to be corrected. (C) 1997 Elsevier Science B.V.

[发布日期] 1997-11-01

[关键词] speckle;interferometry;sensitivity;error;out-of-plane