Simulation of an Optical MEMS pressure sensor

[摘要] This paper explains about an optical pressure sensor based on MEMS technology that measures pressure with a higher accuracy and miniaturized design.The pressure sensor consist of Silicon diaphragm which is used to make the optical fibre pressure sensor, a more reliable model at required industrial working conditions. The design consists of an optical sensing membrane where the amount of deformation of the membrane directly accounts to the pressure applied. The design is built using COMSOL software. This paper also demonstrates the capabilities of COMSOL's frequency domain analysis with input and output ports.

[关键词] Mesa diaphragm;deformation