Anisotropic wet etching on the β-phase poly(vinylidene fluoride) film

[摘要] The ability to fabricate micro patterns or micro structures directly on a flexible and piezoelectric β-phase poly(vinylidene fluoride) (PVDF) film, has potential applications in the field of micro-electro-mechanical systems. The authors realised several tens to several hundred of micro patterns directly on a 110-μm thick flexible β-phase PVDF film by wet-etching technology. Through experiments, the authors also found that the β-phase PVDF film shows anisotropic etching characteristic in the proposed wet-etching process. In this Letter, the authors reported β-phase PVDF film micropattern fabrication process and its anisotropic wet-etching properties for the first time.

[学科分类] 计算机科学（综合）

[关键词] polymer films;etching;piezoelectricity;crystal microstructure;anisotropic wet etching;microstructures;microelectromechanical systems;anisotropic etching characteristics;β-phase PVDF film micropattern;piezoelectric β-phase poly(vinylidene fluoride) film