Compensation of motion coupling effect in AFM imaging

[摘要] The acquisition of a high-quality imaging performance by an atomic force microscope is significantly influenced by the motion coupling effect of its key scanning unit, i.e. its piezoelectric tube scanner. In this Letter, to improve its performance, a MIMO model predictive control scheme for reducing this effect is proposed. The proposed controller achieves this by greatly overcoming the problem of tilted characters in the atomic force microscopy (AFM) scanned images. The experimental results are demonstrating the effectiveness of the proposed control technique.

[学科分类] 计算机科学（综合）

[关键词] atomic force microscopy;predictive control;piezoelectric devices;nanopositioning;AFM imaging;high-quality imaging performance;atomic force microscope;motion coupling effect;key scanning unit;piezoelectric tube scanner;MIMO model predictive control scheme;atomic force microscopy