Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation

[摘要] Bias thermal stability of microelectromechanical system (MEMS) gyroscope is a significant performance parameter for industrial and tactical applications. The quadrature coupling motion and demodulation phase error are two main sources of bias drift. This work presents a MEMS tuning fork gyroscope with dedicated electrostatic correction combs finger structure that can be implemented to suppress the quadrature motion. By utilising a closed-loop control for the coupling stiffness, the temperature variation of quadrature motion achieves >260 times of magnitude reduction, resulting in the thermal bias drift decreased from 0.98 to 0.18°/s with 5.4 times improvement over the temperature from −40 to 60°C. The results indicate that the variation of the quadrature motion is the dominant factor that determines the temperature bias drift of the custom-designed gyroscope. The compensated bias stability (1 σ ) is measured to be ∼8.6°/h by using temperature self-sensing compensation technique over the whole temperature operating range, which demonstrates a considerably competitive result for the tactical-grade MEMS gyroscope.

[学科分类] 计算机科学（综合）

[关键词] micromechanical devices;thermal stability;microsensors;gyroscopes;compensation;closed loop systems;demodulation phase error;MEMS tuning fork gyroscope;dedicated electrostatic correction;finger structure;closed-loop control;coupling stiffness;temperature variation;thermal bias drift;temperature bias drift;custom-designed gyroscope;compensated bias stability;self-sensing compensation technique;temperature operating range;tactical-grade MEMS gyroscope;bias thermal stability improvement;quadrature motion correction;microelectromechanical system gyroscope;quadrature coupling motion;temperature self-sensing compensation;temperature -40.0 degC to 60.0 degC