Local strain gauge based on the nanowires ring resonator embedded in a flexible substrate

[摘要] The authors proposed a flexible microresonator based on nanowires composed of Ⅱ–Ⅵ compounds to detect the small strain caused by external motion. The nanowire ring resonator is embedded in polydimethylsiloxane (PDMS) flexibility to improve the coupling efficiency. In this work, CdS nanowire is fabricated onto a PDMS flexible substrate. With the help of a fibre tip, the single nanowire is manipulated under a microscope, allowing the curved line to be a ring and making the litter overlapping. This overlap increases coupling efficiency and sensor performance. The ring cavity has the parameters of diameter 1 µm, length 75 µm and radius ∼10 µm. Experiments demonstrated the process of fabricating a strain sensor and detected peak shifts. This resonant wavelength appeared red-shift and linear tuned when stretching the flexible substrate. The quality factor was about 2000 and the gauge factor was about 80 nm per stretching unit. Being a small structure and high sensitivity, the sensor can be integrated into the chip. This promotes the development of miniaturisation to some extent. As a result, this work is beneficial to optical manipulation, further being extended to the tunable light source.

[学科分类] 计算机科学（综合）

[关键词] optical resonators;cadmium compounds;microsensors;microcavities;strain gauges;micromechanical resonators;II-VI semiconductors;optical fabrication;micro-optomechanical devices;strain sensors;optical sensors;nanowires;nanosensors;nanofabrication;Q-factor;nanophotonics;resonant wavelength;local strain gauge;flexible microresonator;nanowire ring resonator;polydimethylsiloxane flexibility;coupling efficiency;CdS nanowire;PDMS flexible substrate;single nanowire;ring cavity;strain sensor;II-VI compounds;external motion;fibre tip;microscope;sensor performance;red-shift;quality factor;gauge factor;stretching unit;chip;tunable light source;size 1.0 mum;size 75.0 mum;CdS