Non-isothermal phase-field simulations of laser-written in-plane SiGe heterostructures for photonic applications

[摘要] The design and construction of advanced semiconductor devices relies on the formation of nanostructures with spatially engineered compositions. Here, the authors use phase-field simulations combined with experimental data to understand how to control and utilise phase segregation in SiGe alloys by laser processing for fabrication of in-plane heterostructures.

[学科分类] 地球科学(综合)