Application of Plasma Bridge for Grounding of Conductive Substrates Treated by Transferred Pulsed Atmospheric Arc

[摘要] An atmospheric pressure plasma jet (APPJ) sustained by a pulsed atmospheric arc (PAA) transferred on an electrically conducting surface was operated with a mean power of 700 W, a pulse frequency of 60 kHz, and a gas mixture of N 2 and H 2 with up to 10% H 2, flowing at 30 to 70 SLM. It was shown that the plasma bridge ignited between the grounded injector and electrically conducting and floating substrates can be used for electrical grounding. This allowed for arc transfer on such substrates. The plasma bridge was stable for Argon flow through the injector from 3 to 10 SLM. Its length was between 5 and 15 mm. The plasma bridge current was 350 mA. The copper contact pads on an alumina electronic board were treated using the plasma bridge sustained by Ar injection for grounding. First, an oxide film of about 65 nm was grown by a compressed dry air (CDA) plasma jet. Then, this film was reduced at a speed of 4 cm 2/s by forming gas 95/5 (95% of N 2 and 5% of H 2) plasma jet.

[学科分类] 泌尿医学

[关键词] atmospheric pressure plasma;atmospheric pressure plasma jet;arc;transferred arc;pulsed atmospheric arc;plasma bridge;oxide reduction