Temperature based rapid SAW humidity sensor

[摘要] 400Hz/% RH for trace level detection (0.5–30% RH). It has been observed that sensor sensitivity deteriorates when temperature increased to 40 °C from 10 °C. The sensor has a fast response (~1s) and recovery time (<3s) for trace level humidity detection. The proposed sensor can be used in many applications, including fabrication of electronic devices, IC fabrication, pharmaceutical, textile industries, food processing, semiconductor device fabrication, and packaging.

[学科分类] 社会科学、人文和艺术（综合）

[关键词] PVA;humidity;SAW sensor;sensitivity;operating temperature