Resilient Calcination Transformed Micro-Optics

[摘要] Three-dimensional multiphoton laser lithography of hybrid resins has been shown to be a viable tool for producing micro-optical functional components. The use of calcination heat treatment also allows the transformation of such structures from the initial polymer to final glass and glass-ceramic. Although the laser-induced damage threshold (LIDT) is an important parameter in characterizing all optics, it was not known for such sol–gel-derived glass microstructures. Here we present the first pilot study regarding this parameter, wherein functional microlenses have been made, damaged and calcinated for the series-on-one protocol. The results point to the fact that the LIDT can be increased significantly, even multiple times, thus expanding the usability of such resilient micro-optics.

[关键词] laser 3D printing;multi-photon lithography;glass micro-optics;light induced damage threshold;durable devices;photonic integrated circuits;high light intensity