Design Considerations of Polishing Lap for Computer-Controlled Cylindrical Polishing Process

[摘要] This paper establishes a relationship between the polishing process parameters and the generation of mid spatial-frequency error. The consideration of the polishing lap design to optimize the process in order to keep residual errors to a minimum and optimization of the process (speeds, stroke, etc.) and to keep the residual mid spatial-frequency error to a minimum, is also presented.

[发布日期] 2009-12-06

[学科分类] 机械工程学